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Fabrication of High-Conductivity, Transparent Electrodes with Trenched Metal Bus Lines

机译:带有沟槽金属母线的高导电率透明电极的制造

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摘要

A novel transparent electrode system has been developed for thin film electroluminescent displays in which the poor conductivity of the indium-tin-oxide (ITO) electrodes has been augmented by high-conductivity buses of thick aluminum or silver. The augmented electrode system consists of patterned ITO electrodes, 200 Fm wide, centered over narrow aluminum or silver lines 40 ~m wide and separated by an intermediate diffusion barrier film of titanium to promote adhesion to the ITO and prevent blackening of the main ITO electrode by interfacial reactions. The sheet resistances of the augmented ITO electrodes (A1-Ti-ITO and Ti-Ag-Ti-ITO) were lowered by two orders of magnitude relative to the unaugmented ITO electrodes, yielding absolute values on the order of 0.1 ~/s.
机译:已经开发出用于薄膜电致发光显示器的新颖的透明电极系统,其中通过厚铝或银的高电导率总线来增加铟锡氧化物(ITO)电极的不良电导率。增强电极系统由图案化的ITO电极组成,其宽度为200 Fm,位于宽度为40μm的窄铝线或银线上,并由中间的钛扩散阻挡膜隔开,以促进与ITO的粘合并防止主ITO电极变黑。界面反应。相对于未增强的ITO电极,增强型ITO电极(A1-Ti-ITO和Ti-Ag-Ti-ITO)的薄层电阻降低了两个数量级,其绝对值约为0.1〜/ s。

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